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Rhosonics inline process analyzers are widely used in the semiconductor industry, including. Major applications include binary fluids, i.e. diluted aqueous solutions. Other applications include multi-component liquids and solvents.
Applications of binary aqueous solutions in this industry are: - TMAH 0 to 5 wt%. Accuracy down to +/- 0.002 wt%.
- IPA 0 to 20 wt%. Accuracy down to +/- 0.05 wt% or better.
- KOH in any range from 0 to 0,1% up to 0 to 50 wt%.
Applications of Binary non-aqueous solutions, like solvents, such as strippers, are: - DMSO/MEA at any desirable concentration within 0 to 100%. Accuracy down to +/- 0.5 t%
- Ethanol with H3PO4, range zero to 10 % H3PO4.
Applications of electrolytes and other acid/salt mixtures are: - Cu++ with H2SO4. Both copper ion and acid are analyzed independant of eachother in the copper foil and PCB industry, using a special proprietary algorithm, enabling the analysis of complex liquids without the need for frequent calibrations, without chemicals, without moving parts, with an accuracy that for the fist time closely approaches that of titration analyzers.
Aqueous solutions are generally best measured using the Model 8500 Ultrasonic Inline Analyzer, in combination with a reflective probe.
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