Rhosonics inline process analyzers are widely used in the LCD flat panel production industry.

• Developers, including aqueous solutions, including KOH, NaOH and many others
• Strippers
• Solvents
• Etching liquids, such as HF, NH4F etc.
• Detergents, surfactants, etc.
• Various slurries for CMP purposes

The best solution for your chemical solutions

A list of available liquids for Rhosonics Analyzers is given below.

• NaOH, KOH - undiluted, concentration levels exceeding 30wt%
• NaOH, KOH, diluted, ranges 0.1, 0.5, 1, 2 5 and 20 wt%
• TMAH, various concentrations, i.e. 2.38 w/ or w/o PR
• IPA
• H2O2 concentration, i.e. 30% in water
• DMSO solvent concentration, MEA, etc.
• Oxalic acid
• Organic solvents, i.e. Ethanol with phosporic acid
• HF/NHF4

Rhosonics developed special sensor systems to enable highly accurate measurements in these applications.

For NaOH, KOH, etc.: Model 8500

For TMAH/PR: Model 9570

For applications involving suspended solids: Model 9670

Rhosonics, the Solution Specialist